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Address: B505, JIAYE industry and trade building, North Dapu Road, houting community, Shajing Town, Bao'an District, Shenzhen
Contact person: Xing Sheng 13530602179
Tel: 0755-28050115
Fax: 0755-28050115
DFMSDC magnetron sputtering power supply
 

DFMs series DC magnetron sputtering power supply is suitable for metal films (such as gold, silver, titanium, aluminum, nickel, etc.) with uniform and high quality film quality. This power supply is used in single cathode system and double cathode system of magnetron sputtering. High power output improves production efficiency.
Mainly suitable for: solar cell chip, building glass film, etc.

Input parameters:

Supply voltage:

3×200V±10%

3×380V±10%

Power supply frequency:

50Hz/60Hz

Output parameters:

Output power:

10KW~200KW

Output frequency:

DC

Output voltage:

800V~1200V

Output current:

20A~500A

Current stabilization accuracy:

1%

Cooling mode:

Water cooling + air cooling

Arc extinguishing time:

3ms~100ms

Working mode:

Constant current, constant power

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Address: B505 Jialingyu industry and trade building,Dapu North Road,Houting Community,Shajing,Baoan,Shenzhen Tel: 0755-28050115 Fax: 0755-28050115