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Address: B505, JIAYE industry and trade building, North Dapu Road, houting community, Shajing Town, Bao'an District, Shenzhen
Contact person: Xing Sheng 13530602179
Tel: 0755-28050115
Fax: 0755-28050115
MFMS-IMedium frequency power supply
 

MFMS-I series if power supply is suitable for twin target magnetron sputtering. It has wide output frequency (20kHz ~ 120kHz) and output power (20kW ~ 50KW), cutting-edge arc management technology and very low residual arc energy.
This power supply has mature applications in decoration plating and continuous plating (ITO film, solar cell production, flat panel display, dielectric film, etc.). It is suitable for various processes and applications, and can deposit ultra-thin homogeneous films.

Input parameters:

Supply voltage:

3×200V±10%

3×380V±10%

Power supply frequency:

50Hz/60Hz

Output parameters:

Output power:

10KW~150KW

Output frequency:

20KHz~120KHz

Output voltage:

500V~3000V

Output current:

20A~70A

Current stabilization accuracy:

1%

Cooling mode:

Water cooling + air cooling

Arc extinguishing time:

3ms~100ms

Working mode:

Constant current, constant power

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Address: B505 Jialingyu industry and trade building,Dapu North Road,Houting Community,Shajing,Baoan,Shenzhen Tel: 0755-28050115 Fax: 0755-28050115