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Address: B505, JIAYE industry and trade building, North Dapu Road, houting community, Shajing Town, Bao'an District, Shenzhen
Contact person: Xing Sheng 13530602179
Tel: 0755-28050115
Fax: 0755-28050115
PFMSPulsed magnetron sputtering power supply
 

PFMs series pulsed magnetron sputtering power supply is suitable for metal, alloy and graphite targets. It can obtain high-quality film layers in homogeneity, corrosion resistance, wear resistance, viscosity, hardness, etc. It can be used as a substitute of DC to produce high ion density and ion current density.
Mainly suitable for: metal film, alloy film, carbon film and nitriding film, etc.

Input parameters:

Supply voltage:

3×200V±10%

3×380V±10%

Power supply frequency:

50Hz/60Hz

Output parameters:

Output power:

10KW~150KW

Output frequency:

40KHz~350KHz

Output voltage:

500V~1200V

Output current:

20A~400A

Current stabilization accuracy:

1%

Cooling mode:

Water cooling + air cooling

Arc extinguishing time:

3ms~100ms

Working mode:

Constant current, constant power

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Address: B505 Jialingyu industry and trade building,Dapu North Road,Houting Community,Shajing,Baoan,Shenzhen Tel: 0755-28050115 Fax: 0755-28050115